stoichiometric sputtering

https://doi.org/10.1351/goldbook.09291
State of the sputtering process in which the relative amounts of the elemental components sputtered from a sample are equal to their stoichiometry within the sample.
Note: For most homogeneous materials, stoichiometric sputtering is attained after the sputter removal of a few nanometres from the surface.
See also: steady-state sputtering
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1815 [Terms] [Paper]
Citation: 'stoichiometric sputtering' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09291 RIS BibTex EndNote
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