@article{IUPAC+09291+2025,
url = {https://doi.org/10.1351/goldbook.09291},
institution = {International Union of Pure and Applied Chemistry (IUPAC)},
year = {2025},
title = {stoichiometric sputtering},
doi = {doi:10.1351/goldbook.09291},
edition = {5.0.0}
}