{"term":{"id":"09291","title":"stoichiometric sputtering","longtitle":"IUPAC Gold Book - stoichiometric sputtering","doi":"10.1351\/goldbook.09291","code":"09291","status":"current","definitions":[{"id":1,"text":"State of the sputtering process in which the relative amounts of the elemental components sputtered from a sample are equal to their stoichiometry within the sample.","notes":{"1":"For most homogeneous materials, stoichiometric sputtering is attained after the sputter removal of a few nanometres from the surface."},"links":[{"term":"steady-state sputtering","url":"https:\/\/goldbook.iupac.org\/\/terms\/view\/09289"}],"sources":["PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1815 (https:\/\/doi.org\/10.1515\/pac-2019-0404)"]}],"altoutputs":{"html":"https:\/\/goldbook.iupac.org\/terms\/view\/09291\/html","xml":"https:\/\/goldbook.iupac.org\/terms\/view\/09291\/xml","plain":"https:\/\/goldbook.iupac.org\/terms\/view\/09291\/plain"},"citation":"Citation: 'stoichiometric sputtering' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351\/goldbook.09291","license":"The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https:\/\/creativecommons.org\/licenses\/by-sa\/4.0\/) for individual terms.","collection":"If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org .","disclaimer":"The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.","accessed":"2026-04-20T20:27:29+00:00"}}