State of the sputtering process in which the relative amounts of the elemental components sputtered from a sample are equal to their stoichiometry within the sample.
Note: For most homogeneous materials, stoichiometric sputtering is attained after the sputter removal of a few nanometres from the surface.
See also: steady-state sputtering
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1815 (https://doi.org/10.1515/pac-2019-0404)