sputter yield

https://doi.org/10.1351/goldbook.S05896
The number of particles sputtered from the surface of a target per primary ion.
Source:
PAC, 1979, 51, 2243. (General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2247 [Terms] [Paper]
Citation: 'sputter yield' in IUPAC Compendium of Chemical Terminology, 3rd ed. International Union of Pure and Applied Chemistry; 2006. Online version 3.0.1, 2019. https://doi.org/10.1351/goldbook.S05896 RIS BibTex EndNote
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Last revised: February 24, 2014