Title: sputter yield
Long Title: IUPAC Gold Book - sputter yield
DOI: 10.1351/goldbook.S05896
Status: current

Definition
The number of particles sputtered from the surface of a target per primary ion.

Source
- PAC, 1979, 51, 2243. 'General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2247 (https://doi.org/10.1351/pac197951112243)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/S05896/html
- json: https://goldbook.iupac.org/terms/view/S05896/json
- xml: https://goldbook.iupac.org/terms/view/S05896/xml

Citation: Citation: 'sputter yield' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.S05896
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Accessed: 2026-05-17T23:36:13+00:00