3D lithography

https://doi.org/10.1351/goldbook.09521

Lithography performed in three dimensions, typically carried out using nanoimprint patterning or 2-photon lithography.

Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1878 [Terms] [Paper]
Citation: '3D lithography' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09521 RIS BibTex EndNote
Div. IVTextXMLJSON