lithography

https://doi.org/10.1351/goldbook.09503
Process whereby an image is created on an apparently planar surface.
Note: The term was originally applied within printing technology, but its usage has been extended to embrace the imaging processes of the microfabrication techniques used to make integrated circuits and microelectromechanical systems.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1876 [Terms] [Paper]