2-photon lithography

synonym: two-photon lithography
https://doi.org/10.1351/goldbook.09522
Photolithography within a thick photoresist film, within which the photochemically-induced solubility change results from the simultaneous absorption of two photons.
Notes:
  1. Usually the imaging radiation is of near-IR wavelength.
  2. An instrument such as a confocal microscope can be used for two-photon lithography.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1878 [Terms] [Paper]
Citation: '2-photon lithography' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09522 RIS BibTex EndNote
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