image blur

https://doi.org/10.1351/goldbook.09497
Broadening during the development of a lithographic image.
Note: Image blur is measured as the distance between regions of \(\pu{12}\) and \(\pu{88\%}\) maximum exposure.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1875 [Terms] [Paper]
Citation: 'image blur' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09497 RIS BibTex EndNote
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