development

https://doi.org/10.1351/goldbook.09468
Process in which a developer is used to generate an image by removing the soluble portion of the latent pattern of an exposed resist.
Notes:
  1. Aqueous-based development is carried out using a \(\pu{0.262 M}\) solution of tetramethylammonium hydroxide in water as developer.
  2. Solvent development is carried out using a non-polar solvent as a developer.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1871 [Terms] [Paper]
Citation: 'development' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09468 RIS BibTex EndNote
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