Broadening during the
development of a lithographic
image.
Note: Image blur is measured as the distance between regions of \(\pu{12}\) and \(\pu{88\%}\) maximum exposure.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1875 (https://doi.org/10.1515/pac-2018-1215)