useful spatial resolution

in secondary-ion mass spectrometry
https://doi.org/10.1351/goldbook.09434
Image resolution in secondary ion mass spectrometry obtained in practice.
Note: The image resolution is poorer than the primary-ion beam diameter as a result of either the need to maintain the damage level below a limit set by the integrity of the data or the need to record sufficient signal when the sample is being consumed during analysis.
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1846 [Terms] [Paper]
Citation: 'useful spatial resolution' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09434 RIS BibTex EndNote
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