Image resolution in
secondary ion mass spectrometry obtained in practice.
Note: The image resolution is poorer than the primary-ion beam diameter as a result of either the need to maintain the damage level below a limit set by the integrity of the data or the need to record sufficient signal when the sample is being consumed during analysis.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1846 (https://doi.org/10.1515/pac-2019-0404)