sputtering yield

https://doi.org/10.1351/goldbook.09287
Number of atoms and ions sputtered from a sample divided by the total number of incident primary particles.
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1814 [Terms] [Paper]
Citation: 'sputtering yield' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09287 RIS BibTex EndNote
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