sputtering rate

units: $\pu{s^{-1}}$, $\pu{mol s^{-1}}$, $\pu{kg s^{-1}}$
https://doi.org/10.1351/goldbook.09286
Amount, mass, or number of entities of sample material removed, as a result of particle bombardment, per unit time.
Note: SI unit: \(\pu{mol s^{-1}}\), \(\pu{kg s^{-1}}\), \(\pu{s^{-1}}\).
See also: erosion rate
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1814 [Terms] [Paper]
Citation: 'sputtering rate' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09286 RIS BibTex EndNote
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