damage limit

https://doi.org/10.1351/goldbook.09242
Particle fluence above which significant changes in the spectrum or in a stated peak, arising from damage processes, are observed.
See also: static limit
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1802 [Terms] [Paper]