Particle fluence above which significant changes in the spectrum or in a stated peak, arising from damage processes, are observed.
See also: static limit
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1802 (https://doi.org/10.1515/pac-2019-0404)