photoelectrochemical etching

https://doi.org/10.1351/goldbook.P04606
The dissolution of a semiconductor in an electrolytic solution upon exposure to light. Used in the photopatterning of semiconductor surfaces.
Source:
PAC, 1996, 68, 2223. (Glossary of terms used in photochemistry (IUPAC Recommendations 1996)) on page 2260 [Terms] [Paper]
Citation: 'photoelectrochemical etching' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.P04606 RIS BibTex EndNote
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