Dependence of concentration on depth perpendicular to the surface in a solid sample. It can be obtained by a simultaneous or sequential process of erosion and surface analysis or by measurement of the energy loss of primary backscattered particles produced by nuclear reactions.
Source:
PAC, 1979, 51, 2243. 'General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2247 (https://doi.org/10.1351/pac197951112243)