depth profiling

https://doi.org/10.1351/goldbook.09244
Monitoring of signal intensity as a function of a variable that can be related to distance normal to the surface.
Note: Signal intensity is usually measured as a function of the sputtering time.
See also: compositional depth profile
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1802 [Terms] [Paper]
Citation: 'depth profiling' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09244 RIS BibTex EndNote
Div. VTextXMLJSON