vector scan

https://doi.org/10.1351/goldbook.09583
Pattern formation using a directed electron beam or ion beam that skips from region to region requiring exposure but is otherwise turned off.
See also: raster scan
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1890 [Terms] [Paper]
Citation: 'vector scan' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09583 RIS BibTex EndNote
Div. IVTextXMLJSON