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Version 5.0.0 (14588 Terms)
DOI: 10.1351/goldbook
Jan Kaiser - Content Editor
Stuart J. Chalk - Technical Editor
Joint Subcommittee
on the IUPAC Gold Book
top-down patterning
synonym
: top-down processing
Copy
https://doi.org/10.1351/goldbook.09580
Pattern formation using lithographic (also
embossing
) methods.
Source:
PAC, 2020,
92
, 1861. (
Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)
) on page 1889 [
Terms
] [
Paper
]