swing curve

https://doi.org/10.1351/goldbook.09578
Sinusoidal variation in the lithographic clearance dose arising from changes in the phase difference between incoming and outgoing radiation that is induced by variations in resist thickness.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1889 [Terms] [Paper]
Citation: 'swing curve' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09578 RIS BibTex EndNote
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