https://doi.org/10.1351/goldbook.09573
Introduction of a substituted silyl group (\(\ce{R3Si}\)) to an alcohol, carboxylic acid, amine, thiol, or phosphate, commonly as a protecting group.
Note: Trimethylsilylation used to protect reactive functional groups, such as hydroxy or amino groups, from their reaction with growing anionic species in anionic polymerization.