Introduction of a substituted silyl group (
\(\ce{R3Si}\)) to an alcohol, carboxylic acid, amine, thiol, or phosphate, commonly as a protecting group.
Note: Trimethylsilylation used to protect reactive functional groups, such as hydroxy or amino groups, from their reaction with growing anionic species in anionic polymerization.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1888 (https://doi.org/10.1515/pac-2018-1215)