Title: proximity effect
Long Title: IUPAC Gold Book - proximity effect
DOI: 10.1351/goldbook.09561
Status: current

Definition
Widening of the exposure dose distribution, and hence the developed pattern, caused by the scattering of the primary beam electrons within the resist and substrate.

Related Terms
- exposure dose: https://goldbook.iupac.org//terms/view/09477
- resist: https://goldbook.iupac.org//terms/view/09564

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1885 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09561/html
- json: https://goldbook.iupac.org/terms/view/09561/json
- xml: https://goldbook.iupac.org/terms/view/09561/xml

Citation: Citation: 'proximity effect' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09561
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Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-07-14T12:16:41+00:00