nanoparticle

https://doi.org/10.1351/goldbook.09538
Particle of any shape with an equivalent diameter of approximately \(\pu{1}\) to \(\pu{100 nm}\).
Note: nanoparticle photoresists are used in deep- and extreme-UV photolithography.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1881 [Terms] [Paper]
Citation: 'nanoparticle' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09538 RIS BibTex EndNote
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