Particle of any shape with an equivalent diameter of approximately
\(\pu{1}\) to
\(\pu{100 nm}\).
Note: nanoparticle photoresists are used in deep- and extreme-UV photolithography.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1881 (https://doi.org/10.1515/pac-2018-1215)