microlithography
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https://doi.org/10.1351/goldbook.09514
Lithography
or pattern formation at a resolution of the order of microns.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)