interference lithography

synonym: holographic lithography
https://doi.org/10.1351/goldbook.09511
Technique for patterning regular arrays of fine features without the use of complex optical systems or photomasks.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)