immersion lithography

https://doi.org/10.1351/goldbook.09508

Photolithography that provides resolution enhancement by immersing a resist-coated substrate in a fluid during the exposure process.

See also: immersion fluid
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1877 [Terms] [Paper]
Citation: 'immersion lithography' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09508 RIS BibTex EndNote
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