Photolithography that provides resolution enhancement by immersing a
resist-coated substrate in a fluid during the exposure process.
See also: immersion fluid
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)