Title: lithography
Long Title: IUPAC Gold Book - lithography
DOI: 10.1351/goldbook.09503
Status: current

Definition
Process whereby an image is created on an apparently planar surface.

Note
The term was originally applied within printing technology, but its usage has been extended to embrace the imaging processes of the microfabrication techniques used to make integrated circuits and microelectromechanical systems.

Related Term
- image: https://goldbook.iupac.org//terms/view/09495

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1876 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09503/html
- json: https://goldbook.iupac.org/terms/view/09503/json
- xml: https://goldbook.iupac.org/terms/view/09503/xml

Citation: Citation: 'lithography' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09503
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Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-07-14T19:38:00+00:00