lift-off process

https://doi.org/10.1351/goldbook.09499
Method whereby a film, usually metallic, deposited on a patterned substrate after etch processing, is removed during resist strip, which leaves only that portion of the film that is deposited directly onto the exposed regions of the substrate.
Note: A lift-off process is commonly employed to pattern substrates when using resists that have little or no dry-etch resistance.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1876 [Terms] [Paper]