focused ion beam

acronym: FIB
https://doi.org/10.1351/goldbook.09493
Technique used for the site-specific analysis, deposition, ablation, and micromachining of materials down to dimensions of \(\pu{10}\) to \(\pu{15 nm}\).
Note: FIB should not be confused with ion-beam lithography.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1875 [Terms] [Paper]
Citation: 'focused ion beam' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09493 RIS BibTex EndNote
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