Technique used for the site-specific analysis, deposition, ablation, and micromachining of materials down to dimensions of
\(\pu{10}\) to
\(\pu{15 nm}\).
Note: FIB should not be confused with ion-beam lithography.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1875 (https://doi.org/10.1515/pac-2018-1215)