etch rate

unit: $\pu{\upmu\!m min^{-1}}$
https://doi.org/10.1351/goldbook.09490
Rate of material removal using either a wet or a dry-etch process.
Note: Usually reported in \(\pu{\upmu\!m min^{-1}}\).
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1874 [Terms] [Paper]
Citation: 'etch rate' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09490 RIS BibTex EndNote
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