block copolymer lithography

https://doi.org/10.1351/goldbook.09454
Process in which a thin film of block copolymer is formed into a regular nanoscale pattern.
See also: directed self-assembly
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1868 [Terms] [Paper]
Citation: 'block copolymer lithography' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09454 RIS BibTex EndNote
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