09454 IUPAC Gold Book - block copolymer lithography 10.1351/goldbook.09454 09454 current 1 Process in which a thin film of block copolymer is formed into a regular nanoscale pattern. directed self-assembly https://goldbook.iupac.org//terms/view/09470 PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1868 (https://doi.org/10.1515/pac-2018-1215) https://goldbook.iupac.org/terms/view/09454/html https://goldbook.iupac.org/terms/view/09454/json https://goldbook.iupac.org/terms/view/09454/plain Citation: 'block copolymer lithography' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09454 The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. 2026-05-08T11:59:13+00:00