solvent vapor annealing

https://doi.org/10.1351/goldbook.09448
Annealing via the exposure of a substrate to solvent vapor.
Note: Solvent vapor annealing is most commonly used in lithography to process block copolymer (BCP) thin films, often leading to a more equilibrated structure.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1867 [Terms] [Paper]
Citation: 'solvent vapor annealing' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09448 RIS BibTex EndNote
Div. IVTextXMLJSON