Annealing via the exposure of a substrate to solvent vapor.
Note: Solvent vapor annealing is most commonly used in lithography to process block copolymer (BCP) thin films, often leading to a more equilibrated structure.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)