https://doi.org/10.1351/goldbook.09443
In secondary-ion mass spectrometry, Auger electron spectroscopy, and X-ray photoelectron spectroscopy, distance over which a change in signal intensity from \(\pu{16\%}\) to \(\pu{84\%}\), or from \(\pu{84\%}\) to \(\pu{16\%}\), is measured at the junction of two dissimilar matrices, the thicknesses of which are more than six times that distance
Note: The change in signal intensity should be quoted with the observed interface width.
See also: depth resolution parameter