In
secondary-ion mass spectrometry,
Auger electron spectroscopy, and X-ray photoelectron spectroscopy, distance over which a change in signal intensity from
\(\pu{16\%}\) to
\(\pu{84\%}\), or from
\(\pu{84\%}\) to
\(\pu{16\%}\), is measured at the junction of two dissimilar matrices, the thicknesses of which are more than six times that distance
Note: The change in signal intensity should be quoted with the observed interface width.
See also: depth resolution parameter
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1808 (https://doi.org/10.1515/pac-2019-0404)