thin target

https://doi.org/10.1351/goldbook.09391
In energetic-ion analysis and Rutherford backscattering spectrometry, sample whose thickness is sufficiently small that the variation in energy of particles backscattered from atoms of each constitutive element is small with respect to the system resolution.
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1837 [Terms] [Paper]