selected-area aperture

https://doi.org/10.1351/goldbook.09352
Aperture in the electron or ion optical system restricting the detected signal to a small area of the sample surface.
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1829 [Terms] [Paper]