elemental relative sensitivity factor

https://doi.org/10.1351/goldbook.09330
In dynamic secondary-ion mass spectrometry, coefficient for an element by which the measured intensity of a mass peak for that element, divided by the measured intensity of a mass peak for the matrix, is multiplied to yield the atomic concentration of the element present in the sample.
Notes:
  1. The elemental relative sensitivity factor can be obtained by dividing the relative isotopic sensitivity factor by the isotope abundance of the detected isotope ion.
  2. Matrix terms are strong, and the matrix, bombarding species, incident-ion energy, and angle of incidence, as well as the spectrometer operating conditions, all affect relative elemental sensitivity factors significantly.
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1825 [Terms] [Paper]
Citation: 'elemental relative sensitivity factor' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09330 RIS BibTex EndNote
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