Electron, originating in the incident beam, which is emitted after interaction with the sample.
Notes: - By convention, an electron with energy greater than \(\pu{50 eV}\) can be considered a backscattered electron.
- By convention, the incident beam is often called the primary beam and the backscattered electrons are often referred to as the backscattered primary electrons.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1821 (https://doi.org/10.1515/pac-2019-0404)