volume yield

https://doi.org/10.1351/goldbook.09302
Volume sputtered from a sample divided by number of incident particles.
Note: Volume yield is useful for expressing the amount sputtered in organic layers where molecules can be easily fragmented and values of the molecular sputtering yield can be much more variable between samples than the volume yield.
See also: fractional sputtering yield, partial sputtering yield, fractional ion yield, negative-ion yield, positive-ion yield
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1818 [Terms] [Paper]
Citation: 'volume yield' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09302 RIS BibTex EndNote
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