relative sputtering rate

https://doi.org/10.1351/goldbook.09278

Sputtering rate of a sample divided by the sputtering rate of a reference sample sputtered under the same conditions.

Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1811 [Terms] [Paper]
Citation: 'relative sputtering rate' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09278 RIS BibTex EndNote
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